Negative Nonlinear Dissipation in Microelectromechanical Beams NE Bousse, JML Miller, AL Alter, CP Cameron, HK Kwon, GD Vukasin, ... Journal of Microelectromechanical Systems 29 (5), 954-959, 2020 | 10 | 2020 |
Effect of Substrate Thickness on Anchor Damping in MEMS Devices GD Vukasin, VK Sanchez, CP Cameron, HK Kwon, J Rodriguez, IB Flader, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 7 | 2019 |
Encapsulation by film deposition RN Candler, P Hagelin, C Cameron Handbook of Silicon Based MEMS Materials and Technologies, 669-676, 2020 | 4 | 2020 |
Design Comparison and Survivability of Epitaxially Encapsulated MEMS Disc Resonating Gyroscopes at High Shock (> 27,000 g) CP Cameron, T Imamura, C Devmalya, G Vukasin, A Alter, T Kenny 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2020 | 2 | 2020 |
Epi-Seal MEMS Process G Vukasin, C Cameron | | |