MEMS for nanopositioning: Design and applications
… of the current state of MEMS-based nanopositioners, including their oper… nanopositioning
systems, and discusses the characteristics that can be used to classify various nanopositioner …
systems, and discusses the characteristics that can be used to classify various nanopositioner …
MEMS in Nanopositioning
… MEMS nanopositioners. While exploring the applications of these devices, the emphasis will
be on the use of MEMS nanopositioners … the current state of MEMS nanopositioners with an …
be on the use of MEMS nanopositioners … the current state of MEMS nanopositioners with an …
MEMS nanopositioners
JJ Gorman - Nanopositioning Technologies: Fundamentals and …, 2016 - Springer
… of the art for MEMS nanopositioners. The next section discusses the motivation for using
MEMS in nanopositioning, including the components within a nanopositioner, the performance …
MEMS in nanopositioning, including the components within a nanopositioner, the performance …
A switched actuation and sensing method for a MEMS electrostatic drive
SI Moore, SOR Moheimani - 2016 American Control …, 2016 - ieeexplore.ieee.org
… MEMS nanopositioner published by Maroufi et al. [19]. Section II introduces the MEMS
nanopositioner … Sun, “A MEMS stage for 3axis nanopositioning,” Journal of Micromechanics and …
nanopositioner … Sun, “A MEMS stage for 3axis nanopositioning,” Journal of Micromechanics and …
A 3 degrees-of-freedom electrothermal micro-positioner for optical chip-to-chip alignment
… For phase shifting [33], a MEMScontrolled waveguide was used to tune the phase by
changing the effective … Sun, “A MEMS stage for 3-axis nanopositioning,” in Proc. IEEE Int. Conf. …
changing the effective … Sun, “A MEMS stage for 3-axis nanopositioning,” in Proc. IEEE Int. Conf. …
Design and control of an x-y-θz parallel piezoelectric nanopositioning stage with a large moving platform
B Wang, Y Cui, Y Yang, Q Xie… - Journal of Intelligent …, 2023 - journals.sagepub.com
… nanopositioning stage. The guiding and decoupling mechanism adopted by the nanopositioning
stage is … The advantages of this arrangement are that the stage structure is simple, and …
stage is … The advantages of this arrangement are that the stage structure is simple, and …
Design and stiffness modeling of a compact 3-DOF compliant parallel Nanopositioner for the tool servo of the Ultra Precision Machining
R Wang, X Zhang, Z Yin - 2018 IEEE International Conference …, 2018 - ieeexplore.ieee.org
… are precision micro-electromechanical systems (MEMS) … Then 2-axis and 3-axis FTS
have been developed for the ultra-… Then a 3-axis parallel FTS system was developed for the …
have been developed for the ultra-… Then a 3-axis parallel FTS system was developed for the …
Observer design for a nano-positioning system using neural, fuzzy and ANFIS networks
… In this paper, we aim to estimate the position of an XY nano-positioning stage by designing
… -linear behaviors of nano-positioning systems, like creep and hysteresis, are investigated. …
… -linear behaviors of nano-positioning systems, like creep and hysteresis, are investigated. …
Design, Fabrication, and Control of a Double-Stage MEMS Force Sensor
D Dadkhah, SOR Moheimani - IEEE/ASME Transactions on …, 2024 - ieeexplore.ieee.org
… By directly integrating a nanopositioner onto the MEMS force sensor chip, it becomes possible
to … -stage MEMS force sensor with an on-chip nanopositioner. The nanopositioner enables …
to … -stage MEMS force sensor with an on-chip nanopositioner. The nanopositioner enables …
Design and analysis of a novel compact XYZ parallel precision positioning stage
… micro/nano-positioning stage for large workspace in the literature of (Zhu et al. 2016a, c)
by the same author. Moreover, a 3-DOF XY\(\Theta _z\) nano-positioning stage with simple …
by the same author. Moreover, a 3-DOF XY\(\Theta _z\) nano-positioning stage with simple …