Direct writing of lateral fluorographene nanopatterns with tunable bandgaps and its application in new generation of moiré superlattice

H Li, T Duan, S Haldar, B Sanyal, O Eriksson… - Applied Physics …, 2020 - pubs.aip.org
One of the primary goals for monolayer device fabrications and an ideal model of graphene
as an atomic thin “canvas” is one that permits semiconducting/insulating lateral
nanopatterns to be freely and directly drawn on the semimetallic graphene surface. This
work demonstrates a reversible electron-beam-activated technique that allows direct writing
of semiconducting/insulating fluorographene lateral nanopatterns with tunable bandgaps on
the graphene surface with a resolution down to 9–15 nm. This approach overcomes the …
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