… Here, we introduce ultrathin nano-material structures and fabrication methods that allow
assemblies of heterogeneously integrated functional materials onto soft substrates, with all of …

… Then, we discuss the use of other micro- and nanofabrication … , stimuli-responsive soft
materials or structures for TERM. … a micro to sub-microscale features onto a material's surface.65 …

… of emerging soft electronics. Among the many classes of stretchable materials, micro-/…
of incorporation with other functional materials, including metals and semiconductors. The …

… the material are diverse, ranging and the types of micro- to sub-… is important in micro–nanofabrication
processes and can be … solution and etching material to remove material, which has …

… nanotechnology coupled with advance microfabrication techniques, biocompatible-nanostructured
materials … build up designed 3D biological tissues with micro- to macro-structures by …

… material. Templating can be used to produce micro-/nano surface structures [2,3]. Soft
lithography requires a master to pattern the soft material … facilely acquired from a micro-to 50-nm- …

… and applications of nanotechnology, nanofabrication methods play … of nanotechnology.
None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at …

… of intelligent integration of micro-to-nano … soft lithography [19], [20], which is presently
widely used to rapidly fabricate and replicate elastomeric devices (mechanically soft materials…

… materials fills in the cavities of the molds and results in pattern formation. As a result, a range
of patterns with sizes of features from micro- to … a micro/nanofabrication technique but also …

… the intersection of two major nanofabrication processes: self-assembly and strain engineering.
Self-assembly allows local short-range surface forces of micro- to nanoscale particles to …