In the course of human history, the development of high performance low-cost sensors has
been fundamental for the progress of Homo sapiens in many fields. In the last 20 years, the …

The silicon sensor field is now 30-40 years old and the commercial success of these sensors
in the real world is not satisfactory. In this paper I present an analysis of the most important …

The silicon-sensor field is now more than 35 years old, and meanwhile a deluge of novel
silicon-based sensors has been presented in the literature. This review paper concentrates …

This book deals with a subject that is highly important and has many technological
implications and industrial applications. The material offers an insight into different aspects …

Silicon technology for microelectronics has been growing rapidly and regularly since the
pioneering work of Schokley, Bardeen and Brattain between 1948 and 1952 at Bell …

Soaring Sales of Silicon Sensors Page 1 BUSINESS Sensor Review, 9 (1), p. 33-36.1989, © IFS
Publications, 0260-2288 Soaring sales of silicon sensors Experts claim over 50% of sensor …

The silicon-sensor field is more than 25 years old and people are beginning to wonder if
silicon sensors will ever achieve the success anticipated at the start of these research …

Silicon, as a sensor material, permits the integration of a sensing element and a signal-
processing circuit on a single chip. In order that this attractive concept can be realised for a …

In modern cars, sensors, actuators and electronic components play an increasing role.
Driving forces are the demand for improved safety, higher comfort as well as increased …

In recent years, considerable interest has been shown in silicon, not only as a
semiconductor, but also for the three dimensional structures which can be micromachined …