… For phase shifting [33], a MEMScontrolled waveguide was used to tune the phase by
changing the effective … Sun, “A MEMS stage for 3-axis nanopositioning,” in Proc. IEEE Int. Conf. …

… nanopositioning stage. The guiding and decoupling mechanism adopted by the nanopositioning
stage is … The advantages of this arrangement are that the stage structure is simple, and …

… In this paper, we aim to estimate the position of an XY nano-positioning stage by designing
… -linear behaviors of nano-positioning systems, like creep and hysteresis, are investigated. …

… By directly integrating a nanopositioner onto the MEMS force sensor chip, it becomes possible
to … -stage MEMS force sensor with an on-chip nanopositioner. The nanopositioner enables …

… micro/nano-positioning stage for large workspace in the literature of (Zhu et al. 2016a, c)
by the same author. Moreover, a 3-DOF XY\(\Theta _z\) nano-positioning stage with simple …

In this paper, a novel micro-positioning device based on a 3D digital actuator is presented.
The proposed system allows realizing planar motions of micro-objects, which could be …

… As part of an ongoing effort to develop a nanomanufacturing technique based on MEMS
systems [11], [12], [23], we developed a system of nanopositioners or scanners consisting of a …

… [24] designed a 3-DOF nano-positioning platform based on … [26] designed a compact 3-DOF
micro/nano positioning … a variety of micro/nano positioning platform, and achieved a lot of …

… to be done by two separate stages, namely by a motorized micrometer stage and a piezo-actuated
stage, here both operations are done by the 3-axis positioner. This reduced the space …

… Design of a novel electrothermal actuator for integrated MEMS safety-and-arming devices.
In … Liu, YT; Li, BJ A 3-axis precision positioning device using PZT actuators with low …