[HTML][HTML] Recent advances in mems-based 3d hemispherical resonator gyroscope (hrg)—a sensor of choice

AR Ranji, V Damodaran, K Li, Z Chen, S Alirezaee… - Micromachines, 2022 - mdpi.com
… Xie, Y.; Hsieh, HC; Pai, P.; Kim, H.; Tabib-Azar, M.; Mastrangelo, CH Precision curved micro
hemispherical resonator shells fabricated by poached-egg micro-molding. In Proceedings of …

Development of 3D fused quartz hemi-toroidal shells for high-Q resonators and gyroscopes

MH Asadian, Y Wang, AM Shkel - Journal of …, 2019 - ieeexplore.ieee.org
… Tabib-Azar, and CH Mastrangelo, “Precision curved micro hemispherical resonator shells
fabricated by poached-egg micro-molding,” in Proc. IEEE SENSORS, Taipei, Taiwan, Oct. 2012…

[HTML][HTML] Development of 3D High-Q Fused Quartz Micro Structures for Precision Coriolis Vibratory Gyroscopes

MH Asadian Ardakani - 2019 - escholarship.org
micro-shell resonators. In [32], micromachined polycrystalline diamond hemispherical
resonators were fabricated … In this section, micro-shell resonators fabricated by large deformation …

[图书][B] Development of 3D High-Q Fused Quartz Micro Structures for Precision Coriolis Vibratory Gyroscopes

MHA Ardakani - 2019 - search.proquest.com
… ULE micro-wineglass resonator was proposed in ”Poached-Egg Micro-Moldingfabrication
… by Thermo-Plastic Deformation In this section, micro-shell resonators fabricated by large …

Modeling and compensation of assembly inclination error of micro hemispherical resonator gyroscope under force-to-rebalance mode

Z Ruan, X Ding, Z Qin, J Jia, H Li - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
Micro-assembly technology based on curved sacrificial layer … of the entire micro-hemisphere
shell will be brought. When the … Zhang, “Hemispherical glass shell resonators fabricated

Effect of metallization on quality factor and noise characteristics in fused silica dual-shell gyroscopes

D Wang, MH Asadian, W Guan, D Hii… - Journal of …, 2022 - ieeexplore.ieee.org
… We designed and fabricated FS Dual-Shell Gyroscopes (… Due to curvature of sidewalls of
the inner device shells, the … inclination error of micro hemispherical resonator gyroscope under …

Whole-angle MEMS gyroscopes: challenges and opportunities

D Senkal, AM Shkel - 2020 - books.google.com
… Sections of the Allan Variance curve and their physical … on advances in micro-shell resonator
fabrication processes, … far prevented fabrication of high precision 3-D micro-shell structures …

[图书][B] Micromachined Vibratory Gyroscopes Designed for Precision of Measurements and Environmental Robustness

D Wang - 2022 - search.proquest.com
… Fused Silica Dual-Shell Gyroscope, fabricated using the micro-glassblowing technique …
Precision curved micro hemispherical resonator shells fabricated by poached-egg micro-molding

[HTML][HTML] 高精度小型陀螺仪关键器件加工技术研究进展

陈明君, 王廷章, 刘赫男, 吴春亚, 程健… - 哈尔滨工业大学 …, 2020 - hit.alljournals.cn
… the fabrication technology of high-precision micro gyroscope … 11 SEM images of hemispherical
resonator shells [49-50] … for concave surfaces with small radius of curvature[J]. Journal of …

[PDF][PDF] 微半球谐振陀螺技术研究进展

石岩, 席翔, 吴学忠, 肖定邦 - 导航与控制, 2019 - dhykz.com
… Abstract: Micro hemispherical resonator gyroscope μHRG is … ⁃ ditional hemispherical resonator
gyroscopes HRG , and has … Several typical micro hemispherical resonators fabricated by …