Fabrication of Dual Nanopatterns by Spatial Control of Nanodomain Orientation of Block Copolymer Thin Films
Block copolymers (BCPs) with various types of nanodomains have potential application to
next-generation nanolithography and storage media because of relatively low cost and time …
next-generation nanolithography and storage media because of relatively low cost and time …
Polydimethylsiloxane-assisted alignment transition from perpendicular to parallel of cylindrical microdomains in block copolymer films
X Zheng, Z Li, Y Zhao, T Qu, S Cao, P Wang, Y Li… - RSC …, 2016 - pubs.rsc.org
The orientation transition from perpendicular to parallel alignment of PEO cylindrical
microdomains within PEO-b-PMA (Az) films has been demonstrated via introducing a small …
microdomains within PEO-b-PMA (Az) films has been demonstrated via introducing a small …
Dual nanopatterns consisting of both nanodots and nanoholes on a single substrate
C Choi, M Go, SY Park, S Kang, Y Seo… - … applied materials & …, 2019 - ACS Publications
Block copolymers (BCPs) with various nanostructures such as spheres, cylinders, gyroid,
and lamellae, have received great attention for their application in nanolithography through …
and lamellae, have received great attention for their application in nanolithography through …
Self-assembled block polymer templates as high resolution lithographic masks
Diblock copolymer thin films have recently received more attention due to their ability to
organize into nanometric structures under thermal annealing. This phenomenon was …
organize into nanometric structures under thermal annealing. This phenomenon was …
High Aspect Ratio PS-b-PMMA Block Copolymer Masks for Lithographic Applications
F Ferrarese Lupi, TJ Giammaria, FG Volpe… - … applied materials & …, 2014 - ACS Publications
The control of the self-assembly (SA) process and nanostructure orientation in diblock
copolymer (DBC) thick films is a crucial technological issue. Perpendicular orientation of the …
copolymer (DBC) thick films is a crucial technological issue. Perpendicular orientation of the …
Vacuum-Driven Orientation of Nanostructured Diblock Copolymer Thin Films
AS Panda, YC Lee, CJ Hung, KP Liu, CY Chang… - ACS …, 2022 - ACS Publications
This work aims to demonstrate a facile method for the controlled orientation of
nanostructures of block copolymer (BCP) thin films. A simple diblock copolymer system …
nanostructures of block copolymer (BCP) thin films. A simple diblock copolymer system …
Spatial arrangement of block copolymer nanopatterns using a photoactive homopolymer substrate
Spatial control of the orientation of block copolymers (BCPs) in thin films offers enormous
opportunities for practical nanolithography applications. In this study, we demonstrate the …
opportunities for practical nanolithography applications. In this study, we demonstrate the …
Large-area nanosquare arrays from shear-aligned block copolymer thin films
While block copolymer lithography has been broadly applied as a bottom-up patterning
technique, only a few nanopattern symmetries, such as hexagonally packed dots or parallel …
technique, only a few nanopattern symmetries, such as hexagonally packed dots or parallel …
Silicon-containing block copolymers for lithographic applications
TY Lo, MR Krishnan, KY Lu, RM Ho - Progress in Polymer Science, 2018 - Elsevier
This comprehensive review, summarizes recent advances in the fabrication of well-ordered
block copolymer (BCP) thin films by different methods, focusing on the development of …
block copolymer (BCP) thin films by different methods, focusing on the development of …
Block copolymer nanostructured thin films for advanced patterning
MA Chavis, EL Schwartz… - … , Characterization, and Self …, 2011 - Wiley Online Library
In this chapter, we explore the convergence of two fundamentally different patterning
approaches for nanostructured polymer thin films. The well‐established 'top …
approaches for nanostructured polymer thin films. The well‐established 'top …