[HTML][HTML] Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - iopscience.iop.org
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …
techniques for single digit miniaturization and next generation lithography. DSA achieves …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - ijemnet.com
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …
techniques for single digit miniaturization and next generation lithography. DSA achieves …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - cir.nii.ac.jp
抄録< jats: title> Abstract</jats: title>< jats: p> Directed self-assembly (DSA) emerges as one
of the most promising new patterning techniques for single digit miniaturization and next …
of the most promising new patterning techniques for single digit miniaturization and next …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - sciopen.com
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …
techniques for single digit miniaturization and next generation lithography. DSA achieves …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - ijemnet.com
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …
techniques for single digit miniaturization and next generation lithography. DSA achieves …