Universal interfacial control through polymeric nanomosaic coating for block copolymer nanopatterning
… as an inexpensive, robust, and reliable patterning method. As … films, which often cannot
provide necessary nanopatterns. … the PNM layer with a shadow mask using UVO or an oxygen …
provide necessary nanopatterns. … the PNM layer with a shadow mask using UVO or an oxygen …
Fabrication of Dual Nanopatterns by Spatial Control of Nanodomain Orientation of Block Copolymer Thin Films
… Because of a strong acid of HF, its concentration in DI water has to be as small as possible
… as a mask. When we used dual nanopatterns on the silicon substrate as an etching mask, a …
… as a mask. When we used dual nanopatterns on the silicon substrate as an etching mask, a …
Thin film block copolymer self-assembly for nanophotonics
AA Kulkarni, GS Doerk - Nanotechnology, 2022 - iopscience.iop.org
… of block copolymer-based nanopatterning and highlights … self-assembled block copolymer
nanopatterns and improved … polymer removal by ashing produced robust etch masks for highly …
nanopatterns and improved … polymer removal by ashing produced robust etch masks for highly …
Block copolymer nanopatterning for nonsemiconductor device applications
GG Yang, HJ Choi, KH Han, JH Kim… - … Applied Materials & …, 2022 - ACS Publications
… thick film (ie, more than 1 μm) based on BCP nanopatterning, … of BCP nanopatterns with
mechanically robust micropatterns … Using a BCP nanopattern as a patterning mask, electrodes …
mechanically robust micropatterns … Using a BCP nanopattern as a patterning mask, electrodes …
Hierarchical, self-assembled metasurfaces via exposure-controlled reflow of block copolymer-derived nanopatterns
AA Kulkarni, GS Doerk - ACS Applied Materials & Interfaces, 2022 - ACS Publications
… Furthermore, although the smallest shadow mask feature we … By applying our method to thin
film nanopatterns formed by … -range order, highlights their strong potential for the fabrication …
film nanopatterns formed by … -range order, highlights their strong potential for the fabrication …
Direct Printing of Ultrathin Block Copolymer Film with Nano‐in‐Micro Pattern Structures
… a useful and reliable dual nanopatterning method capable of … desired surfaces by controlling
the film thickness of BCPs, the … The remaining PR patterns were used as an etch mask to …
the film thickness of BCPs, the … The remaining PR patterns were used as an etch mask to …
Optimized design of block copolymers with covarying properties for nanolithography
… simulations to specify the design rules for block copolymer (BCP) materials for use in the …
film, followed by an Ar/O 2 etch, leaving a line-space pattern of alumina as an etch mask (Fig…
film, followed by an Ar/O 2 etch, leaving a line-space pattern of alumina as an etch mask (Fig…
Nano-patterning on multilayer MoS2 via block copolymer lithography for highly sensitive and responsive phototransistors
… copolymer (RCP) as well as to prevent damage to MoS 2 during the etching process 26,31,37
. The BCP was spin-coated on the RCP film … The BCP nanotemplate was used as a mask …
. The BCP was spin-coated on the RCP film … The BCP nanotemplate was used as a mask …
Graphene-enabled block copolymer lithography transfer to arbitrary substrates
WK Lee, JT Robinson, KE Whitener - Nano Express, 2021 - iopscience.iop.org
… the ability to create nanopatterns of higher complexity by stacking multiple BCP masks, a
capability … strong enough to support small electronic and polymeric structures as well [11, 12]. …
capability … strong enough to support small electronic and polymeric structures as well [11, 12]. …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - iopscience.iop.org
… mask preparation for pattern transfer. Unfortunately, the low χ value of PS-b-PMMA limits
nanopatterning to … exhibits higher etch resistance, resulting in a more robust pattern transfer …
nanopatterning to … exhibits higher etch resistance, resulting in a more robust pattern transfer …