Methods of deposition of hydrogenated amorphous silicon for device applications
WG Van Sark - Handbook of Thin Films, 2002 - Elsevier
Publisher Summary This chapter describes the deposition of hydrogenated amorphous
silicon (a-Si: H) and related materials by employing a low-temperature, low-density plasma …
silicon (a-Si: H) and related materials by employing a low-temperature, low-density plasma …
[PDF][PDF] Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications
WG van Sark - Citeseer
This chapter describes the deposition of hydrogenated amorphous silicon (a-Si: H) and
related materials by employing a low-temperature, low-density plasma. The method …
related materials by employing a low-temperature, low-density plasma. The method …
Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications
WG Van Sark - Thin Films and Nanostructures, 2002 - Elsevier
This chapter describes the deposition of hydrogenated amorphous silicon (a-Si: H) and
related materials by employing a low-temperature, low-density plasma. The method …
related materials by employing a low-temperature, low-density plasma. The method …