A planar variable reluctance magnetic micromotor with fully integrated stator and coils

Journal of Microelectromechanical Systems, 1993 - ieeexplore.ieee.org
A fully functional electrically excited planar variable reluctance magnetic micromotor has
been demonstrated on a silicon wafer. The motor uses a micromachined nickel-iron rotor …
被引用次数：229 相关文章

[引用][C] A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils

CH AHN - Proc. IEEE MEMS'93 Workshop, 1993 - cir.nii.ac.jp
A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils
| CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ …

[引用][C] A planar variable reluctane magnetic micromotor with fully integrated stator and coils

CH AHN, YJ KIM, MG ALLEN - Journal of …, 1993 - pascal-francis.inist.fr
A planar variable reluctane magnetic micromotor with fully integrated stator and coils CNRS Inist
Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search Advanced …

A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils

CH Ahn, YJ Kim, MG Allen - [1993] Proceedings IEEE Micro …, 1993 - ieeexplore.ieee.org
A fully functional electrical excited planar variable reluctance magnetic micromotor has been
demonstrated on a silicon wafer. The motor uses a micromachined nickel-iron rotor and a …

Planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils

CH Ahn, YJ Kim, MG Allen - … of the 1993 IEEE Micro Electro …, 1993 - yonsei.elsevierpure.com
A new, fully functional, electrically excited planar variable reluctance magnetic micromotor
has been demonstrated on a silicon wafer. The motor uses a micromachined nickel-iron …

A Planar Variable Reluctance Magnetic Micromotor with Fully Integrated Stator and Coils

CH Ahn, YJ Kim, MG Allen - Journal of …, 1993 - yonsei.elsevierpure.com
A fully functional electrically excited planar variable reluctance magnetic micromotor has
been demonstrated on a silicon wafer. The motor uses a micromachined nickel-iron rotor …

[引用][C] A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils

CH AHN - Proc. IEEE Micro Electro Mecahincal Systems …, 1993 - cir.nii.ac.jp
A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped
coils | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索 …

[引用][C] A planar variable reluctane magnetic micromotor with fully integrated stator and coils

CH AHN, YJ KIM, MG ALLEN - Journal of …, 1993 - Institute of Electrical and Electronics …