[PDF][PDF] Nanometric resolution absolute position encoders

P Masa, E Franzi, C Urban - esmats.eu
Linear, rotary and 2D optical, absolute position encoder principle combines several
competitive features such as sub-nanometric resolution over practically infinite range, up to …

[PDF][PDF] NANOMETRIC RESOLUTION ABSOLUTE POSITION ENCODERS

P Masa, E Franzi, C Urban - esmats.eu
Linear, rotary and 2D optical, absolute position encoder principle combines several
competitive features such as sub-nanometric resolution over practically infinite range, up to …