X-ray reflectometry characterization of porous silicon films prepared by a glancing-angle deposition method

S Asgharizadeh, M Sutton, K Robbie, T Brown - Physical Review B …, 2009 - APS
The competitive growth process of ballistic deposition is studied experimentally using x-ray
reflectivity characterization of silicon thin films deposited with various vapor incidence …
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X-ray reflectometry characterization of porous silicon films prepared by a glancing-angle deposition method

S Asgharizadeh, M Sutton, K Robbie… - Physical Review …, 2009 - ui.adsabs.harvard.edu
The competitive growth process of ballistic deposition is studied experimentally using x-ray
reflectivity characterization of silicon thin films deposited with various vapor incidence …