Fabrication of thin films with highly porous microstructures
An evaporation process has been developed for depositing highly porous insulator or metal
films with densities as low as 15% of bulk. The process utilizes either multiple evaporation …
films with densities as low as 15% of bulk. The process utilizes either multiple evaporation …
Fabrication of thin films with highly porous microstructures
K Robbie, LJ Friedrich, SK Dew, T Smy… - Journal of Vacuum …, 1995 - pubs.aip.org
An evaporation process has been developed for depositing highly porous insulator or metal
films with densities as low as 15% of bulk. The process utilizes either multiple evaporation …
films with densities as low as 15% of bulk. The process utilizes either multiple evaporation …
Fabrication of thin films with highly porous microstructures
K Robbie, LJ Friedrich, SK Dew… - Journal of Vacuum …, 1995 - ui.adsabs.harvard.edu
An evaporation process has been developed for depositing highly porous insulator or metal
films with densities as low as 15% of bulk. The process utilizes either multiple evaporation …
films with densities as low as 15% of bulk. The process utilizes either multiple evaporation …
Fabrication of thin films with highly porous microstructures
K Robbie, LJ Friedrich, SK Dew, T Smy… - Journal of Vacuum …, 1995 - cir.nii.ac.jp
抄録< jats: p> An evaporation process has been developed for depositing highly porous
insulator or metal films with densities as low as 15% of bulk. The process utilizes either …
insulator or metal films with densities as low as 15% of bulk. The process utilizes either …