High and low dielectric constant materials
R Singh, RK Ulrich - The Electrochemical Society Interface, 1999 - iopscience.iop.org
26 The Electrochemical Society Interface• Summer 1999 ilicon-based dielectrics (SiO2,
Si3N4, SiOxNy etc.) have been widely used as the key dielectrics in the manufacturing of …
Si3N4, SiOxNy etc.) have been widely used as the key dielectrics in the manufacturing of …
[引用][C] High and low dielectric constant materials
R SINGH, RK ULRICH - The Electrochemical Society interface, 1999 - pascal-francis.inist.fr
High and low dielectric constant materials CNRS Inist Pascal-Francis CNRS Pascal and
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