Scheduling of Single-Arm Cluster Tools Handling Multiple Wafer Types Based on Double-Layer Configuration of Processing Modules
J Wang, T Leng, C Liu, MC Zhou… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
With the rapid changes and diversity of market demand, fabs have to produce wafers in
many varieties and small batches. This brings a great challenge to the scheduling of wafer …
many varieties and small batches. This brings a great challenge to the scheduling of wafer …
Scheduling of Single-Arm Cluster Tools Handling Multiple Wafer Types Based on Double-Layer Configuration of Processing Modules
J Wang, T Leng, C Liu, MC Zhou… - IEEE Transactions on …, 2023 - researchwith.njit.edu
With the rapid changes and diversity of market demand, fabs have to produce wafers in
many varieties and small batches. This brings a great challenge to the scheduling of wafer …
many varieties and small batches. This brings a great challenge to the scheduling of wafer …