A manufacturable AlScN periodically polarized piezoelectric film bulk acoustic wave resonator (AlScN P3F BAW) operating in overtone mode at X and Ku Band

R Vetury, A Kochhar, J Leathersich… - 2023 IEEE/MTT-S …, 2023 - ieeexplore.ieee.org
This paper reports a manufacturable, Periodically Polarized Piezoelectric Film (P3F) Bulk
Acoustic Wave (BAW) resonator using Aluminum Scandium Nitride (AlScN) materials …
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[PDF] b-cdn.net

[PDF][PDF] A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Operating in Overtone Mode at X and Ku …

R Vetury, A Kochhar, J Leathersich, C Moe, M Winters… - cdn-akoustis.b-cdn.net
Polarized Piezoelectric Film (P3F) Bulk Acoustic Wave (BAW) resonator using Aluminum
Scandium Nitride (AlScN) materials operating in overtone mode at X and Ku band. P3F BAW …
[PDF] akoustis.com

[PDF][PDF] A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Operating in Overtone Mode at X and Ku …

R Vetury, A Kochhar, J Leathersich, C Moe, M Winters… - akoustis.com
Polarized Piezoelectric Film (P3F) Bulk Acoustic Wave (BAW) resonator using Aluminum
Scandium Nitride (AlScN) materials operating in overtone mode at X and Ku band. P3F BAW …