Effect of microbubbles on ozonized water for photoresist removal

M Takahashi, H Horibe, K Matsuura… - Journal of Photopolymer …, 2015 - jstage.jst.go.jp
The existence of microbubbles in ozonized water has been shown to significantly enhance
the photoresist removal rate due to an elevated dissolved ozone concentration and a direct …
被引用次数：24 相关文章

Effect of Microbubbles on Ozonized Water for Photoresist Removal

T Masayoshi, H Hideo, M Kouhei… - Journal of Photopolymer …, 2015 - cir.nii.ac.jp
抄録 The existence of microbubbles in ozonized water has been shown to significantly
enhance the photoresist removal rate due to an elevated dissolved ozone concentration and …

Effect of microbubbles on ozonized water for photoresist removal

M Takahashi, H Horibe… - Journal of …, 2015 - tohoku.elsevierpure.com
The existence of microbubbles in ozonized water has been shown to significantly enhance
the photoresist removal rate due to an elevated dissolved ozone concentration and a direct …

[引用][C] Effect of Microbubbles on Ozonized Water for Photoresist Removal

M Takahashi, H Horibe, K Matsuura, K Tatera - Journal of Photopolymer Science and …, 2015