Directed self-assembly of POSS containing block copolymer on lithographically defined chemical template with morphology control by solvent vapor

Y Tada, H Yoshida, Y Ishida, T Hirai… - …, 2012 - ACS Publications
Strongly segregating block copolymers (BCPs) are attractive as a means of forming 10 nm
scale lithographic features. Here, we report directed self-assembly of polyhedral oligomeric …
被引用次数：106 相关文章

[引用][C] Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined Chemical Template with Morphology Control by Solvent Vapor

Y TADA, H YOSHIDA, Y ISHIDA, T HIRAI… - Macromolecules …, 2012 - pascal-francis.inist.fr
Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined
Chemical Template with Morphology Control by Solvent Vapor CNRS Inist Pascal-Francis CNRS …

Directed self-assembly of POSS containing block copolymer on lithographically defined chemical template with morphology control by solvent vapor

Y Tada, H Yoshida, Y Ishida, T Hirai… - …, 2012 - kyushu-u.elsevierpure.com
Strongly segregating block copolymers (BCPs) are attractive as a means of forming 10 nm
scale lithographic features. Here, we report directed self-assembly of polyhedral oligomeric …

[引用][C] Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined Chemical Template with Morphology Control by Solvent Vapor

Y Tada, H Yoshida, I Yoshihito, T Hirai, JK Bosworth… - Macromolecules, 2011 - cir.nii.ac.jp
Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined
Chemical Template with Morphology Control by Solvent Vapor | CiNii Research CiNii 国立 …

[引用][C] Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined Chemical Template with Morphology Control by Solvent Vapor

Y Tada, H Yoshida, Y Ishida, T Hirai… - …, 2012 - ui.adsabs.harvard.edu
Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined
Chemical Template with Morphology Control by Solvent Vapor - NASA/ADS Now on home page …

[引用][C] Directed self-assembly of POSS containing block copolymer on lithographically defined chemical template with morphology control by solvent vapor

Y TADA - Macromolecules, 2012 - cir.nii.ac.jp
Directed self-assembly of POSS containing block copolymer on lithographically defined
chemical template with morphology control by solvent vapor | CiNii Research CiNii 国立情報学 …

[引用][C] Directed Self-Assembly of POSS Containing Block Copolymer on Lithographically Defined Chemical Template with Morphology Control by Solvent Vapor

Y TADA, H YOSHIDA, Y ISHIDA, T HIRAI… - …, 2012 - American Chemical Society