Low-order feedforward control schemes for flexible motion systems with different rigid-body damping

X Li, SL Chen, CS Teo, KK Tan - 2015 IEEE International …, 2015 - ieeexplore.ieee.org
Lightweight stages are becoming the new trend in industrial high performance motion
systems. They are generally less stiff than the traditional designs and more pronounced …

Low-order feedforward control schemes for flexible motion systems with different rigid-body damping

X Li, SL Chen, CS Teo, KK Tan - 2015 IEEE International Conference on … - infona.pl
Lightweight stages are becoming the new trend in industrial high performance motion
systems. They are generally less stiff than the traditional designs and more pronounced …