Advanced techniques for glancing angle deposition

K Robbie, JC Sit, MJ Brett - Journal of Vacuum Science & Technology …, 1998 - pubs.aip.org
When a thin film is deposited by physical vapor deposition, with the vapor flux arriving at an
oblique angle from the substrate normal, and under conditions of sufficiently limited adatom …
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[PDF][PDF] Advanced techniques for glancing angle deposition

K Robbie, JC Sit, MJ Brett - J. Vac. Sci. Technol. B, 1998 - scholar.archive.org
When a thin film is deposited by physical vapor deposition, with the vapor flux arriving at an
oblique angle from the substrate normal, and under conditions of sufficiently limited adatom …

[引用][C] Advanced techniques for glancing angle deposition

K Robbie - Journal of Vacuum Science & Technology B …, 1998 - cir.nii.ac.jp
Advanced techniques for glancing angle deposition | CiNii Research CiNii 国立情報学
研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データをさがす 大学 …

Advanced techniques for glancing angle deposition

K Robbie, JC Sit, MJ Brett - Journal of Vacuum Science …, 1998 - ui.adsabs.harvard.edu
When a thin film is deposited by physical vapor deposition, with the vapor flux arriving at an
oblique angle from the substrate normal, and under conditions of sufficiently limited adatom …

Advanced techniques for glancing angle deposition

K Robbie, JC Sit, MJ Brett - Journal of Vacuum Science & Technology …, 1998 - pubs.aip.org
When a thin film is deposited by physical vapor deposition, with the vapor flux arriving at an
oblique angle from the substrate normal, and under conditions of sufficiently limited adatom …

[引用][C] Advanced techniques for glancing angle deposition

K ROBBIE - J. Vac. Sci. Technol. B, 1998 - cir.nii.ac.jp
Advanced techniques for glancing angle deposition | CiNii Research CiNii 国立情報学
研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データをさがす 大学 …