PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
T de los Arcos, P Awakowicz, J Benedikt… - Plasma Processes …, 2024 - Wiley Online Library
This feature article presents recent results on the analysis of plasma/polymer interactions
and the nucleation of ultra‐thin plasma films on polymeric substrates. Because of their high …
and the nucleation of ultra‐thin plasma films on polymeric substrates. Because of their high …
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
T de los Arcos, P Awakowicz, J Benedikt… - arXiv e …, 2023 - ui.adsabs.harvard.edu
This feature article considers the analysis of the initial states of film growth on polymer
substrates. The assembled results are based on the cooperation between research groups …
substrates. The assembled results are based on the cooperation between research groups …