Structure and electrical properties of boron doped hydrogenated mixed-phase silicon films for uncooled microbolometer

C Shin, DP Pham, J Park, S Kim, YJ Lee, J Yi - Infrared Physics & …, 2019 - Elsevier
Boron doped hydrogenated silicon films used as thermo-sensing layers in infrared detectors
or uncooled micro-bolometers are prepared by radio-frequency plasma-enhanced chemical …
被引用次数：18 相关文章

Structure and electrical properties of boron doped hydrogenated mixed-phase silicon films for uncooled microbolometer

C Shin, DP Pham, J Park, S Kim… - Infrared Physics and …, 2019 - ui.adsabs.harvard.edu
Boron doped hydrogenated silicon films used as thermo-sensing layers in infrared detectors
or uncooled micro-bolometers are prepared by radio-frequency plasma-enhanced chemical …

Structure and electrical properties of boron doped hydrogenated mixed-phase silicon films for uncooled microbolometer

C Shin, DP Pham, J Park, S Kim… - INFRARED PHYSICS …, 2019 - scholarworks.bwise.kr
Boron doped hydrogenated silicon films used as thereto-sensing layers in infrared detectors
or uncooled microbolometers are prepared by radio-frequency plasma-enhanced chemical …