9.5% scandium doped ALN PMUT compatible with pre-processed CMOS substrates
2021 IEEE 34th International Conference on Micro Electro …, 2021•ieeexplore.ieee.org
This paper presents an 80 μm squared piezoelectric micromachined ultrasonic transducer
(PMUT) using 9.5% scandium-doped aluminum nitride (AlScN). The improvement in the
effective piezoelectric coefficient (e 31, f) and consequently in the membrane displacement
was demonstrating according with the FEM simulation. The proposed device has a high
piezoelectric coefficient factor (kt 2) in air, 2.76%, and also in liquid environment, 1.12%. The
output pressure normalized at 1.5 mm in Fluorinert gives 12.57 kPa/V/mm 2,~ 9 times higher …
(PMUT) using 9.5% scandium-doped aluminum nitride (AlScN). The improvement in the
effective piezoelectric coefficient (e 31, f) and consequently in the membrane displacement
was demonstrating according with the FEM simulation. The proposed device has a high
piezoelectric coefficient factor (kt 2) in air, 2.76%, and also in liquid environment, 1.12%. The
output pressure normalized at 1.5 mm in Fluorinert gives 12.57 kPa/V/mm 2,~ 9 times higher …
This paper presents an 80 μm squared piezoelectric micromachined ultrasonic transducer (PMUT) using 9.5 % scandium-doped aluminum nitride (AlScN). The improvement in the effective piezoelectric coefficient (e 31,f ) and consequently in the membrane displacement was demonstrating according with the FEM simulation. The proposed device has a high piezoelectric coefficient factor (k t 2 ) in air, 2.76 %, and also in liquid environment, 1.12 %. The output pressure normalized at 1.5 mm in Fluorinert gives 12.57 kPa/V/mm 2 , ~ 9 times higher than 7x7 AlScN array (1.4 kPa/V/mm 2 ). Pulse-echo experiment was validated with a single PMUT considering as reflected surface the air-liquid interface.
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