A cutoff probe is a diagnostic method to find the absolute plasma density through simple
means. However, when the cutoff probe is used in the high density plasma diagnostics, the
probe can be faced with measurement problems because the high influx energy from the
plasma can damage the probe tips, especially for the dielectric material in the vicinity of the
probe tips. Because this damage cannot only cause an error in the measurement of electron
density but also acts as a contamination source in the plasma, a solution for the cutoff probe …

A cutoff probe is the novel diagnostic method to get the absolute plasma density with simple
system and less assumption. However, high density of ion flux from plasma on probe tip can
make the error of plasma density measurement because the dielectric material of probe tip
can be damaged by ion flux. We proposed a shielded cutoff probe using the ceramic tube for
protection from ion flux. The ceramic tube on probe tip can intercept the ion flux from plasma.
The transmitted spectrum using the shielded cutoff probe is good agreement with E/M wave …