This paper presents a high dynamic range CMOSMEMS capacitive accelerometer. An array
of small masses enables the accelerometer to survive and measure high-G (kG)
acceleration. A fine-grain offset compensation technique suppresses the offset due to sense
capacitance mismatch. The key idea is to employ two out of 184 accelerometer cells to tune
out the charge imbalance, which ensures 90X improved tuning resolution (sub-aF offset).
Multiple temperature sensors are integrated on the same accelerometer chip to improve the …

This thesis explains the design, fabrication and characterization steps of a high dynamic
range CMOS-MEMS capacitive accelerometer array and on-chip environmental sensors for
bias drift compensation. Inertial navigation under harsh environments requires a high
dynamic range accelerometer that can survive and provide continuous readout accuracy
through shock events, while having a large dynamic range to capture fine-scale motions.
The dynamic range target is set as 156 dB in accordance with navigation standard macro …