A manufacturable AlScN periodically polarized piezoelectric film bulk acoustic wave resonator (AlScN P3F BAW) operating in overtone mode at X and Ku Band

R Vetury, A Kochhar, J Leathersich… - 2023 IEEE/MTT-S …, 2023 - ieeexplore.ieee.org
R Vetury, A Kochhar, J Leathersich, C Moe, M Winters, J Shealy, RH Olsson
2023 IEEE/MTT-S International Microwave Symposium-IMS 2023, 2023ieeexplore.ieee.org
This paper reports a manufacturable, Periodically Polarized Piezoelectric Film (P3F) Bulk
Acoustic Wave (BAW) resonator using Aluminum Scandium Nitride (AlScN) materials
operating in overtone mode at X and Ku band. P3F BAW technology benefits from a
significantly larger film thickness than the traditional BAW thickness-frequency scaling
approach, enabling a manufacturable, high quality-factor (Q), and high frequency resonator
technology. A P3F material stack was realized using a combination of single and …
This paper reports a manufacturable, Periodically Polarized Piezoelectric Film (P3F) Bulk Acoustic Wave (BAW) resonator using Aluminum Scandium Nitride (AlScN) materials operating in overtone mode at X and Ku band. P3F BAW technology benefits from a significantly larger film thickness than the traditional BAW thickness-frequency scaling approach, enabling a manufacturable, high quality-factor (Q), and high frequency resonator technology. A P3F material stack was realized using a combination of single and polycrystalline AlScN layers with desired polarity of layers as deposited, which enables volume manufacturing. An AlScN P3F BAW resonator was manufactured using XBAW®, a unique and patented transferred substrate process technology for next generation resonator and filter solutions. The fabricated P3F BAW resonators demonstrated 2nd overtone operation at 10.7 GHz & 18 GHz, and exhibits a FoM, (Qp × kt2) of 27 and 20, respectively. This result suggests that AlScN P3F BAW using overtone mode operation enables miniature, manufacturable, BAW RF filter technology for X band and higher frequencies.
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