A resonant microaccelerometer with high sensitivity operating in an oscillating circuit
C Comi, A Corigliano, G Langfelder… - Journal of …, 2010 - ieeexplore.ieee.org
Journal of microelectromechanical systems, 2010•ieeexplore.ieee.org
A new micromachined uniaxial silicon resonant accelerometer characterized by a high
sensitivity and very small dimensions is presented. The device's working principle is based
on the frequency variations of two resonating beams coupled to a proof mass. Under an
external acceleration, the movement of the proof mass causes an axial load on the beams,
generating opposite stiffness variations, which, in turn, result in a differential separation of
their resonance frequencies. A high level of sensitivity is obtained, owing to an innovative …
sensitivity and very small dimensions is presented. The device's working principle is based
on the frequency variations of two resonating beams coupled to a proof mass. Under an
external acceleration, the movement of the proof mass causes an axial load on the beams,
generating opposite stiffness variations, which, in turn, result in a differential separation of
their resonance frequencies. A high level of sensitivity is obtained, owing to an innovative …
A new micromachined uniaxial silicon resonant accelerometer characterized by a high sensitivity and very small dimensions is presented. The device's working principle is based on the frequency variations of two resonating beams coupled to a proof mass. Under an external acceleration, the movement of the proof mass causes an axial load on the beams, generating opposite stiffness variations, which, in turn, result in a differential separation of their resonance frequencies. A high level of sensitivity is obtained, owing to an innovative and optimized geometrical design of the device that guarantees a great amplification of the axial loads. The acceleration measure is obtained, owing to a properly designed oscillating circuit. In agreement with the theoretical prediction, the experimental results show a sensitivity of 455 Hz/ ( g being the gravity acceleration) with a resonant frequency of about 58 kHz and a good linearity in the range of interest.
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