Bistable silicon photonic MEMS switches
H Sattari, A Toros, T Graziosi… - MOEMS and Miniaturized …, 2019 - spiedigitallibrary.org
… switches [14], … bistability in silicon photonic MEMS technology enables zero-power
consumption devices. In this work, we propose a design for a bistable silicon photonic MEMS switch …
consumption devices. In this work, we propose a design for a bistable silicon photonic MEMS switch …
A bistable silicon photonic mems phase switch for nonvolatile photonic circuits
P Edinger, AY Takabayashi… - … Conference (MEMS), 2022 - ieeexplore.ieee.org
… Silicon photonic circuits are rapidly growing in complexity and … photonic MEMS π-phase
switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics …
switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics …
Nonvolatile silicon photonic MEMS switch based on centrally clamped stepped bistable mechanical beams
… The 2 × 2 silicon photonic MEMS switch proposed in this paper primarily consists of three
components: CCS beams, an electrostatic comb actuator, and a compact HAC with an …
components: CCS beams, an electrostatic comb actuator, and a compact HAC with an …
A novel bistable optical phase shifter using non-volatile MEMS actuator for application in photonic integrated circuits
… With the development of silicon photonics in recent years, several researches have been
conducted in the field of implementing PICs for applications such as artificial intelligence, …
conducted in the field of implementing PICs for applications such as artificial intelligence, …
Highly scalable digital silicon photonic MEMS switches
… silicon photonic MEMS switch with digital control and broadband operation. Using MEMS-actuated
vertical adiabatic couplers as switching … In conjunction with the bistable operation of …
vertical adiabatic couplers as switching … In conjunction with the bistable operation of …
Toward nonvolatile switching in silicon photonic devices
… Here, we focus on bistability based on a looped hysteretic … switching that might be integrated
on the silicon photonics platform. The simplest way to achieve optical bistability on silicon is …
on the silicon photonics platform. The simplest way to achieve optical bistability on silicon is …
Silicon photonic MEMS phase-shifter
… approaches have been exploited in compact large array switches [8,9], … for Silicon Photonic
MEMS variable optical attenuators (VOA) [13] and bistable Silicon Photonic MEMS switches […
MEMS variable optical attenuators (VOA) [13] and bistable Silicon Photonic MEMS switches […
Optical actuation of a bistable MEMS
M Sulfridge, T Saif, N Miller… - … of microelectromechanical …, 2002 - ieeexplore.ieee.org
… is used to switch the state of a micron thick bistable MEMS beam, causing it to toggle by
up to 23 microns. The bistable system was studied earlier in [31], where the switching of state …
up to 23 microns. The bistable system was studied earlier in [31], where the switching of state …
Design and fabrication of reliable power efficient bistable MEMS switch using single mask Process
G Thachil, DR Nair, A DasGupta - … of Microelectromechanical …, 2020 - ieeexplore.ieee.org
… CONCLUSION The objective of the present work was to realize a bistable MEMS switch with
low switching power, low switching time and simple fabrication process. To achieve this goal…
low switching power, low switching time and simple fabrication process. To achieve this goal…
Bistable micromechanical fiber-optic switches on silicon with thermal actuators
M Hoffmann, P Kopka, E Voges - Sensors and Actuators A: Physical, 1999 - Elsevier
… A new bistable moving-fiber switch for applications in optical communication systems is
developed by employing advanced bulk silicon micromachining. The bistable switch utilizes …
developed by employing advanced bulk silicon micromachining. The bistable switch utilizes …
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