Bistable silicon photonic MEMS switches

H Sattari, A Toros, T Graziosi… - MOEMS and Miniaturized …, 2019 - spiedigitallibrary.org
switches [14], … bistability in silicon photonic MEMS technology enables zero-power
consumption devices. In this work, we propose a design for a bistable silicon photonic MEMS switch

A bistable silicon photonic mems phase switch for nonvolatile photonic circuits

P Edinger, AY Takabayashi… - … Conference (MEMS), 2022 - ieeexplore.ieee.org
Silicon photonic circuits are rapidly growing in complexity and … photonic MEMS π-phase
switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics

Nonvolatile silicon photonic MEMS switch based on centrally clamped stepped bistable mechanical beams

Q Ma, Y Hu, Y Lu, Y Liu, H Li, D Dai - Photonics Research, 2024 - opg.optica.org
… The 2 × 2 silicon photonic MEMS switch proposed in this paper primarily consists of three
components: CCS beams, an electrostatic comb actuator, and a compact HAC with an …

A novel bistable optical phase shifter using non-volatile MEMS actuator for application in photonic integrated circuits

Y Gholami, K Jafari, MH Moaiyeri - Optics Communications, 2025 - Elsevier
… With the development of silicon photonics in recent years, several researches have been
conducted in the field of implementing PICs for applications such as artificial intelligence, …

Highly scalable digital silicon photonic MEMS switches

TJ Seok, N Quack, S Han, RS Muller… - Journal of Lightwave …, 2016 - opg.optica.org
silicon photonic MEMS switch with digital control and broadband operation. Using MEMS-actuated
vertical adiabatic couplers as switching … In conjunction with the bistable operation of …

Toward nonvolatile switching in silicon photonic devices

J Parra, I Olivares, A Brimont… - Laser & Photonics …, 2021 - Wiley Online Library
… Here, we focus on bistability based on a looped hysteretic … switching that might be integrated
on the silicon photonics platform. The simplest way to achieve optical bistability on silicon is …

Silicon photonic MEMS phase-shifter

H Sattari, T Graziosi, M Kiss, TJ Seok, S Han… - Optics …, 2019 - opg.optica.org
… approaches have been exploited in compact large array switches [8,9], … for Silicon Photonic
MEMS variable optical attenuators (VOA) [13] and bistable Silicon Photonic MEMS switches […

Optical actuation of a bistable MEMS

M Sulfridge, T Saif, N Miller… - … of microelectromechanical …, 2002 - ieeexplore.ieee.org
… is used to switch the state of a micron thick bistable MEMS beam, causing it to toggle by
up to 23 microns. The bistable system was studied earlier in [31], where the switching of state …

Design and fabrication of reliable power efficient bistable MEMS switch using single mask Process

G Thachil, DR Nair, A DasGupta - … of Microelectromechanical …, 2020 - ieeexplore.ieee.org
… CONCLUSION The objective of the present work was to realize a bistable MEMS switch with
low switching power, low switching time and simple fabrication process. To achieve this goal…

Bistable micromechanical fiber-optic switches on silicon with thermal actuators

M Hoffmann, P Kopka, E Voges - Sensors and Actuators A: Physical, 1999 - Elsevier
… A new bistable moving-fiber switch for applications in optical communication systems is
developed by employing advanced bulk silicon micromachining. The bistable switch utilizes …