Characterization of MEMS heat sinks having straight microchannels integrating square pin-fins for liquid cooling of microelectronic chips
A Alkhazaleh, F Alnaimat, B Mathew - Thermal Science and Engineering …, 2023 - Elsevier
This work presents a liquid based MEMS (microelectromechanical systems) heat sink
having straight microchannel integrating square pin-fins for cooling of microelectronic chips.
Simulation based studies are carried out for evaluating the operation of this MEMS heat sink
and the contribution of geometric features on its behavior. The behavior of the MEMS heat
sink is calculated using pumping power and thermal resistance while the behavior of the
flow passage is calculated based on of Poiseuille and Nusselt numbers. Investigations are …
having straight microchannel integrating square pin-fins for cooling of microelectronic chips.
Simulation based studies are carried out for evaluating the operation of this MEMS heat sink
and the contribution of geometric features on its behavior. The behavior of the MEMS heat
sink is calculated using pumping power and thermal resistance while the behavior of the
flow passage is calculated based on of Poiseuille and Nusselt numbers. Investigations are …
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