Rutherford backscattering spectrometry (RBS) has been in regular use at IUAC as an ion beam based analytical technique for providing accurate information about the elemental composition near surface of the material. RBS gives pertinent information about composition profile of the target within a few micro meter depth from the surface. This technique is very useful not only for thin films but also for bulk samples. In this paper, the RBS analysis for a self-supported, carbon backed and caped nuclear target samples has been presented. Some of the advantages of RBS for these samples are as follows.(i) It is a nondestructive technique for precious targets.(ii) This gives accurate estimation of thickness and composition of target film.(iii) Knowing the presence of impurities can help to select best sample and necessary modification can be done during sample preparation.(iv) Samples uniformity can also be verified.(v) The accurate information about the thickness helps in suitable energy selection for experiment [1].