Design and investigation of dielectric engineered dopant segregated Schottky barrier MOSFET with NiSi source/drain
S Kale, PN Kondekar - IEEE Transactions on Electron Devices, 2017 - ieeexplore.ieee.org
IEEE Transactions on Electron Devices, 2017•ieeexplore.ieee.org
In this paper, to solve an important issue of low ON-state current in the nickel silicide (NiSi)
metal source/drain Schottky barrier (SB) MOSFET (SBMOS), we have reported a novel
dielectric engineered (DE) dopant segregated (DS) SBMOS structure using gate dielectric
engineering. In a proposed device, we employ two different gate dielectric materials. The
high-k gate dielectric is used at the source side and low-k gate dielectric at the drain side.
Beneath the high-k gate dielectric, electron accumulation increases due to large gate …
metal source/drain Schottky barrier (SB) MOSFET (SBMOS), we have reported a novel
dielectric engineered (DE) dopant segregated (DS) SBMOS structure using gate dielectric
engineering. In a proposed device, we employ two different gate dielectric materials. The
high-k gate dielectric is used at the source side and low-k gate dielectric at the drain side.
Beneath the high-k gate dielectric, electron accumulation increases due to large gate …
In this paper, to solve an important issue of low ON-state current in the nickel silicide (NiSi) metal source/drain Schottky barrier (SB) MOSFET (SBMOS), we have reported a novel dielectric engineered (DE) dopant segregated (DS) SBMOS structure using gate dielectric engineering. In a proposed device, we employ two different gate dielectric materials. The high-k gate dielectric is used at the source side and low-k gate dielectric at the drain side. Beneath the high-k gate dielectric, electron accumulation increases due to large gate dielectric capacitance density. As a result, reduction in depletion of source side dopant segregation layer further decreases the SB tunneling width for the electron injection. Consequently, improvement in ON-state current (I ON ) is obtained. In addition, the low-k gate dielectric and drain side dopant segregation layer increases the effective SB height and tunneling width for the hole injection. Thus, the OFF-state current (I OFF ) is suppressed. The optimization of proposed device has been performed by modulating the length of high-k and the low-k gate dielectric. In addition, we have compared the performance of the proposed device in terms of ON to OFF current ratio (I ON /I OFF ), subthreshold swing (SS), transconductance(g m ), transconductance generation factor (g m /I D ), cut-off frequency (f T ), and gain-bandwidth product (f A ) to the SBMOS, DS SBMOS, and DS SBMOS with the full high-k gate dielectric. Moreover, we have proposed the possible process flow for the DE DS SBMOS fabrication.
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