Development of solid-state nanopore fabrication technologies
T Deng, M Li, Y Wang, Z Liu - Science bulletin, 2015 - Elsevier
As the key components of nanopore-based nucleic acid sequencing systems, nanopores
have drawn more and more scientific interests over these years. Although most of the early
nanopore-based sequencers adopted biological nanopores, solid-state nanopores have
been gradually growing in popularity due to their increased robustness and durability,
control over pore geometry and surface properties, as well as compatibility with the existing
semiconductor and microfluidics fabrication techniques. Besides acting as a platform for …
have drawn more and more scientific interests over these years. Although most of the early
nanopore-based sequencers adopted biological nanopores, solid-state nanopores have
been gradually growing in popularity due to their increased robustness and durability,
control over pore geometry and surface properties, as well as compatibility with the existing
semiconductor and microfluidics fabrication techniques. Besides acting as a platform for …
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