Experimental investigation on size-dependent higher-mode vibration of cantilever microbeams

Z Li, Y He, J Lei, S Han, S Guo, D Liu - Microsystem Technologies, 2019 - Springer
Z Li, Y He, J Lei, S Han, S Guo, D Liu
Microsystem Technologies, 2019Springer
A new perspective is presented to study size-dependent elasticity experimentally within
micron scale utilizing dynamic approach. The size-dependent vibration of cantilever
microbeams made of nickel is studied for the first three transverse modes. The normalized
natural frequency of the first mode manifests strong size effect as reported. Remarkably, the
normalized natural frequencies of the second and third mode also increase to 1.9 times as
the thickness of microbeams decreases from 15 to 2.1 μm. Similarly the normalized bending …
Abstract
A new perspective is presented to study size-dependent elasticity experimentally within micron scale utilizing dynamic approach. The size-dependent vibration of cantilever microbeams made of nickel is studied for the first three transverse modes. The normalized natural frequency of the first mode manifests strong size effect as reported. Remarkably, the normalized natural frequencies of the second and third mode also increase to 1.9 times as the thickness of microbeams decreases from 15 to 2.1 μm. Similarly the normalized bending rigidity increases to about 3.5 times. It is the first time that elastic size effect is observed in vibration of higher modes. Moreover, the size-dependent vibration of the first mode is interpreted in light of the modified couple stress theory, and the theoretical prediction also fit the experimental results of high modes very well. Hence it is confirmed that modified couple stress theory is valid for vibration of higher modes too.
Springer
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