In this paper, the authors have developed and implemented a decentralized decision-making strategy using field-programmable gate array (FPGA) technology as a prototype for an integrated controller of a microelectromechanical systems (MEMS) array for air-flow planar micromanipulation. The MEMS array was proposed to be integrated in a hybrid multichip module containing the FPGA-based controller. Algorithms and architectures, used for the decentralized control implementation and the hardware resource optimization, are described. A charge-coupled device camera was used to make each MEMS like an autonomous system when the distributed MEMS chip was tested. Finally, under air-flow condition, the FPGA-based decentralized control system successfully performed an object manipulation.