Vanadium oxide (VxOy) multilayer sandwich structures previously studied by our group were
found to yield a sensitive thermometer thin film material suitable for microbolometer
applications. In this work, we aim to estimate the performance of a proposed air-bridge
microbolometer configuration based on VxOy multilayer sandwich structure thermometer
thin films. For this purpose, a microbolometer was fabricated on silicon (Si) substrate
covered with a silicon nitride (Si3N4) insulating layer using VxOy thermometer thin film …