[HTML][HTML] Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

K Kang, M Sang, B Xu, KJ Yu - STAR protocols, 2023 - Elsevier
STAR protocols, 2023Elsevier
Wearable temperature sensors with high thermal sensitivity are required for precise and
continuous body temperature monitoring. Here, we present a protocol for fabricating a thin,
stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped
crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping
technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based
wearable temperature sensor. For complete details on the use and execution of this …
Summary
Wearable temperature sensors with high thermal sensitivity are required for precise and continuous body temperature monitoring. Here, we present a protocol for fabricating a thin, stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based wearable temperature sensor.
For complete details on the use and execution of this protocol, please refer to Sang et al. (2022).1
Elsevier
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