[图书][B] Flexible MEMS sensors and pyroelectric thin films
M Ahmed - 2014 - search.proquest.com
2014•search.proquest.com
MEMS sensors on flexible substrates were developed and fabricated utilizing conventional
lithography, deposition and etching tools. All of these sensors were fabricated in a MESA
structure on the flexible substrates for tactile sensing, robotic, and biomedical applications.
In addition, a new processing technique was developed to release the flexible substrate
more easily from the rigid silicon carrier wafer to increase fabrication yield.
lithography, deposition and etching tools. All of these sensors were fabricated in a MESA
structure on the flexible substrates for tactile sensing, robotic, and biomedical applications.
In addition, a new processing technique was developed to release the flexible substrate
more easily from the rigid silicon carrier wafer to increase fabrication yield.
Abstract
MEMS sensors on flexible substrates were developed and fabricated utilizing conventional lithography, deposition and etching tools. All of these sensors were fabricated in a MESA structure on the flexible substrates for tactile sensing, robotic, and biomedical applications. In addition, a new processing technique was developed to release the flexible substrate more easily from the rigid silicon carrier wafer to increase fabrication yield.
ProQuest以上显示的是最相近的搜索结果。 查看全部搜索结果