Fly-inspired MEMS directional acoustic sensor for sound source direction

A Rahaman, B Kim - … on Solid-State Sensors, Actuators and …, 2019 - ieeexplore.ieee.org
2019 20th International Conference on Solid-State Sensors …, 2019ieeexplore.ieee.org
The total internal noise of conventional sound source detection (SSD) comprising of multiple
sensors is relatively high, which is their fundamental drawback. This paper reports a novel
approach of SSD based on the cosine dependency of each wing of piezoelectric MEMS
directional microphone rather than relying on time difference of arrival (TDOA), which will
allow continuous monitoring of unwanted noise. The sensor noise is minimized by
incorporating a noise minimizing sensing combination made of aluminium nitride (AlN) and …
The total internal noise of conventional sound source detection (SSD) comprising of multiple sensors is relatively high, which is their fundamental drawback. This paper reports a novel approach of SSD based on the cosine dependency of each wing of piezoelectric MEMS directional microphone rather than relying on time difference of arrival (TDOA), which will allow continuous monitoring of unwanted noise. The sensor noise is minimized by incorporating a noise minimizing sensing combination made of aluminium nitride (AlN) and D33 mode. The experimentally measured results serve the novelty of this work.
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