Frequency Fluctuations in CMOS-MEMS Oscillators: Towards the Thermomechanical Limit
2018 IEEE International Symposium on Circuits and Systems (ISCAS), 2018•ieeexplore.ieee.org
We measured the frequency stability of fully integrated self-sustained CMOS-MEMS
oscillators and compared it with the theoretical thermomechanical limit. Experimental data
obtained from a fully CMOS compatible CC-Beam MEMS resonator with on-chip capacitive
readout and electrostatic excitation in open-and closed-loop configuration is provided. Our
results show that the frequency stability is 1.8 ppm in ambient air conditions for an
integration time of 40ms, and 0.63 ppm in vacuum, being only two times larger than the …
oscillators and compared it with the theoretical thermomechanical limit. Experimental data
obtained from a fully CMOS compatible CC-Beam MEMS resonator with on-chip capacitive
readout and electrostatic excitation in open-and closed-loop configuration is provided. Our
results show that the frequency stability is 1.8 ppm in ambient air conditions for an
integration time of 40ms, and 0.63 ppm in vacuum, being only two times larger than the …
We measured the frequency stability of fully integrated self-sustained CMOS-MEMS oscillators and compared it with the theoretical thermomechanical limit. Experimental data obtained from a fully CMOS compatible CC-Beam MEMS resonator with on-chip capacitive readout and electrostatic excitation in open- and closed-loop configuration is provided. Our results show that the frequency stability is 1.8 ppm in ambient air conditions for an integration time of 40ms, and 0.63 ppm in vacuum, being only two times larger than the ultimate limit set by the thermomechanical vibrations.
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