… In addition to demonstrating ultra-high Q, wavelength scale, cavities in high refractive
index materials (nSi~3.5), we have recently theoretically demonstrated photonic crystal
nanobeam cavities with Q~300,000 and Q>1,000,000 in glass/polymer (n~1.5) and silicon-nitride
(n~2), respectively [3]. These low- and moderate- refractive index materials have a wide
electronic bandgap and therefore are … In conclusion, we demonstrated that photonic
crystal nanobeam cavities are powerful building block for realization of nanophotonic …

We investigate the design, fabrication, and experimental characterization of high quality
factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered one-
dimensional photonic crystal mirror and precise control of the cavity length, we designed
cavities with theoretical quality factors as high as 1.4× 10 7⁠. By detecting the cross-
polarized resonantly scattered light from a normally incident laser beam, we measure a
quality factor of nearly 7.5× 10 5⁠. The effect of cavity size on mode frequency and quality …