Hot-carrier degradation in power LDMOS: Selective LOCOS-versus STI-based architecture

AN Tallarico, S Reggiani, R Depetro… - IEEE Journal of the …, 2018 - ieeexplore.ieee.org
AN Tallarico, S Reggiani, R Depetro, AM Torti, G Croce, E Sangiorgi, C Fiegna
IEEE Journal of the Electron Devices Society, 2018ieeexplore.ieee.org
In this paper, we present an analysis of the degradation induced by hot-carrier stress in new
generation power lateral double-diffused MOS (LDMOS) transistors. Two architectures with
the same nominal voltage and comparable performance featuring a selective LOCOS and a
shallow-trench isolation are investigated by means of constant voltage stress measurements
and TCAD simulations. In particular, the on-resistance degradation in linear regime is
experimentally extracted and numerically reproduced under different stress conditions. A …
In this paper, we present an analysis of the degradation induced by hot-carrier stress in new generation power lateral double-diffused MOS (LDMOS) transistors. Two architectures with the same nominal voltage and comparable performance featuring a selective LOCOS and a shallow-trench isolation are investigated by means of constant voltage stress measurements and TCAD simulations. In particular, the on-resistance degradation in linear regime is experimentally extracted and numerically reproduced under different stress conditions. A similar amount of degradation has been reached by the two architectures, although different physical mechanisms contribute to the creation of the interface states. By using a recently developed physics-based degradation model, it has been possible to distinguish the damage due to collisions of single high-energetic electrons (single-particle events) and the contribution of colder electrons impinging on the silicon/oxide interface (multiple-particle events). A clear dominance of the single-electron collisions has been found in the case of LOCOS structure, whereas the multiple-particle effect plays a clear role in STI-based device at larger gate-voltage stress.
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