Molecular nanolayers (MNLs) are attractive for suppressing chemical transport and mixing at
copper-silica interfaces. Here, we demonstrate that hydrophobic fluoroalkyl moieties
enhance the effectiveness of organosilane MNLs to inhibit copper diffusion. Bias thermal
annealing of copper-MNL-silica capacitors with MNLs having different fluoroalkyl contents,
combined with electron spectroscopy and contact angle measurements, show that the
enhanced barrier properties are due to diminished water uptake and curtailed copper …