Investigation and development of vertically aligned carbon nanotube (VACNT) forest based temperature sensor
M Rana, MRM Asyraf - Microelectronic Engineering, 2016 - Elsevier
This paper demonstrates an investigation of vertically aligned CNTs forest based
temperature sensor grown on highly doped silicon substrate. The diameter and thicknesses
of the VACNTs were considered as 10–30 nm and 500 μm, respectively. Two aluminium
plates were attached at two opposite terminal of VACNTs to interface Variac and ammeter
across them to measure current-temperature relationship. Prior to the experiment, the
VACNTs was attached on the electric heater. To capture the current across VACNTs, the …
temperature sensor grown on highly doped silicon substrate. The diameter and thicknesses
of the VACNTs were considered as 10–30 nm and 500 μm, respectively. Two aluminium
plates were attached at two opposite terminal of VACNTs to interface Variac and ammeter
across them to measure current-temperature relationship. Prior to the experiment, the
VACNTs was attached on the electric heater. To capture the current across VACNTs, the …
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