[HTML][HTML] Large area deep ultraviolet light of Al0. 47Ga0. 53N/Al0. 56Ga0. 44N multi quantum well with carbon nanotube electron beam pumping
Large area deep ultraviolet (DUV) light is generated by carbon nanotube (CNT) cold
cathode electron beam (C-beam) irradiation on Al 0.47 Ga 0.53 N/Al 0.56 Ga 0.44 N multi
quantum wells (MQWs) anode. We developed areal electron beam (EB) with CNT cold
cathode emitters. The CNT emitters on silicon wafer were deposited with an area of 188 mm
2, and these were vertically aligned and had conical structures. We optimized the C-beam
irradiation conditions to effectively excite AlGaN MQWs. When AlGaN MQWs were excited …
cathode electron beam (C-beam) irradiation on Al 0.47 Ga 0.53 N/Al 0.56 Ga 0.44 N multi
quantum wells (MQWs) anode. We developed areal electron beam (EB) with CNT cold
cathode emitters. The CNT emitters on silicon wafer were deposited with an area of 188 mm
2, and these were vertically aligned and had conical structures. We optimized the C-beam
irradiation conditions to effectively excite AlGaN MQWs. When AlGaN MQWs were excited …
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