We present time-resolved reflectivity, photoluminescence, dark conductivity and morphology
studies of light-emitting Si prepared by pulsed XeCl laser irradiation of amorphous
hydrogenated silicon (a-Si: H) deposited on a silica substrate by glow discharge deposition.
Laser-induced melting and recrystallization of the a-Si: H layers lead to visible room
temperature photoluminescence, accompanied by an increase in dark conductivity by more
than three orders of magnitude. We investigate the influence of the number of applied laser …