MEMS absolute pressure sensor on a flexible substrate

M Ahmed, DP Butler… - 2012 IEEE 25th …, 2012 - ieeexplore.ieee.org
2012 IEEE 25th International Conference on Micro Electro …, 2012ieeexplore.ieee.org
This paper describes the fabrication and characterization of micromachined, piezoresistive,
absolute pressure sensors sandwiched between a flexible polyimide. The sensors are
designed for structural health monitoring in aerospace applications. A suspended aluminum
oxide diaphragm is utilized where nichrome (Ni-80%/Cr-20%) piezoresistive sensors are
placed in a half Wheatstone bridge geometry to ensure a linear response and thermal
stability. The sensitivity was found to be 1.51 nV/Pa with an average dynamic range of 8.31 …
This paper describes the fabrication and characterization of micromachined, piezoresistive, absolute pressure sensors sandwiched between a flexible polyimide. The sensors are designed for structural health monitoring in aerospace applications. A suspended aluminum oxide diaphragm is utilized where nichrome (Ni-80%/Cr-20%) piezoresistive sensors are placed in a half Wheatstone bridge geometry to ensure a linear response and thermal stability. The sensitivity was found to be 1.51 nV/Pa with an average dynamic range of 8.31 MPa.
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