… as a roughing pump for other miniature high vacuum pumps and they could create together
a tandem working from atmospheric pressure down to high vacuum. The pumps reported by …

… high and ultra-high vacuum in MEMS devices are described. … pump on-chip with MEMS-type
device or with vacuum part of … of a miniature vacuum pump with MEMS device is assurance …

… possible MEMS instruments … vacuum MEMS for at least 5 years. In our previous publications
we demonstrated possibility of on-chip pumping of MEMS structures by integrated MEMS ion…

… features as a miniature vacuum pump - no moving parts and … Compressor fabricated using
MEMS fabrication techniques (… MEMS Knudsen Compressor device's thermal and pumping …

… vacuum in small-volume microelectromechanical (MEMS) devices. A concept of equipping
vacuum MEMS with miniature vacuum pump … The ion-sorption vacuum micropump developed …

… This pumping is done by a class of materials … vacuum-packaged MEMS/MOEMS. With proper
materials and processes, controlled ambients to include vacuum can be obtained in MEMS/…

… “chip pump” will operate at 200,000 revolutions per minute with 5um tip gaps. The ultimate
goal of this study is to apply this technique to a MEMS style vacuum pump, although the latter …

… vacuum pump In this paper a novel concept of a miniature vacuum MEMS-type pump with a
… , it should be integrated with MEMS-type vacuum sensors. Many different examples of such …

… It seems that the problem with generating vacuum in micro scale can be eliminated by
constructing some kind of miniature vacuum pump, integrated with MEMS structure. There are …

… study are large for MEMS devices, but to allow for smaller scale devices in future iterations,
the blade shapes are kept to simple polygons. For vacuum pumps, the main requirement is to …