Microelectromechanical resonator and a method for producing the same
T Pensala, A Jaakkola - US Patent 8,916,942, 2014 - Google Patents
The invention relates to temperature compensated micro electro-mechanical (MEMS)
resonators (300) preferably made of silicon. Prior art MEMS resonators have a significant
temperature coefficient of resonance frequency, whereby it is difficult to achieve a sufficiently
good frequency stability. The inventive MEMS resonator has a resonance plate (310) which
resonates in Lamé mode. The resonance plate is p+ doped material. Such as silicon doped
with boron, and the concen tration of the p+ doping is such that the plate has a tempera ture …
resonators (300) preferably made of silicon. Prior art MEMS resonators have a significant
temperature coefficient of resonance frequency, whereby it is difficult to achieve a sufficiently
good frequency stability. The inventive MEMS resonator has a resonance plate (310) which
resonates in Lamé mode. The resonance plate is p+ doped material. Such as silicon doped
with boron, and the concen tration of the p+ doping is such that the plate has a tempera ture …
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